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    Columbia Campus
  Jul 12, 2024
2015-2016 Undergraduate Bulletin 
2015-2016 Undergraduate Bulletin [Archived Catalog]

EMCH 567 - Bio Nano/Micro Electro-Mechanical Systems

Credits: 3

Nano/microfabrication for nano/microstructures, photolithography, self-assembly, etching techniques, physical and chemical vapor deposition, surface and bulk micromachining, MEMS inegration and packaging; applications in Biomedical Engineering; microactuators, biomicrosensors, and biomedical devices.

Prerequisites: CHEM 112, CHEM 112L, PHYS 212